Zobrazeno 1 - 8
of 8
pro vyhledávání: '"D. A. Bohling"'
Autor:
K. R. Coyle, G. Zorn, D. A. Bohling, B. S. Felker, W. Kern, H. Treichel, A. P. Lane, G. Tempel, M. George, A. Mitwalsky, N. P. Sandler
Publikováno v:
ChemInform. 26
Publikováno v:
MRS Proceedings. 340
Due to the extreme toxicity, and in the case of Sb stability, of the Group V hydrides, alternative gaseous Group V sources for III-V epitaxy are highly desirable. Trisdimethylaminoarsenic (DMAAs) has proven to be a useful replacement for AsH 3 for gr
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:86
The thermal oxidation of CZ‐grown p(100) Si has been investigated in the temperature range of 400–1000 °C in a rapid thermal processing reactor. In this study we present the results of investigating chemical analysis of the process gases enterin
Autor:
K. R. Mann, D. A. Bohling
Publikováno v:
Chemischer Informationsdienst. 15
Publikováno v:
Chemischer Informationsdienst. 16
Publikováno v:
Chemischer Informationsdienst. 16
Publikováno v:
Chemischer Informationsdienst. 13
Autor:
Miss D. M. Bohling, Jess Chernak
Publikováno v:
SIMULATION. 5:287-287