Zobrazeno 1 - 2
of 2
pro vyhledávání: '"D Zeljka Nikitovic"'
Autor:
D Vladimir Stojanovic, D Zeljka Nikitovic, D Martina Gilic, Z Nebojsa Romcevic, M Zoran Raspopovic, S Milica Petrovic
Publikováno v:
Science of Sintering, Vol 48, Iss 3, Pp 379-386 (2016)
In this work we select most probable reactions of alkali metal ion Na+ with dimethoxyethane (DXE) molecule. Appropriate gas phase enthalpies of formation for the products were used to calculate scattering cross section as a function of kinetic energy
Publikováno v:
FME Transactions, Vol 44, Iss 1, Pp 105-108 (2016)
FME Transactions (2016) 44(1):105-108
FME Transactions (2016) 44(1):105-108
Plasma etching represents one of the critical steps in manufacturing of integrated circuits. Further optimization of plasma equipment is needed since new generations in technology require different plasma chemistry. In this paper, we will study the i