Zobrazeno 1 - 10
of 15
pro vyhledávání: '"D Yu Zaroslov"'
Autor:
V E Matyushkov, G S Volkov, T. M. Makhviladze, D. Yu. Zaroslov, A A Shalapenok, K. A. Valiev, L. V. Velikov, D R Il'kaev
Publikováno v:
Soviet Journal of Quantum Electronics. 20:446-450
Experimental and mathematical modeling methods were used in an investigation of the influence of the degree of coherence at the entry to an optical projection system on the quality of the resultant images. It is shown that laser projection lithograph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::436236039b870118e7a13b91ca9143e0
https://doi.org/10.1070/qe1990v020n04abeh005953
https://doi.org/10.1070/qe1990v020n04abeh005953
Publikováno v:
Microelectronic Engineering. 11:173-181
The coherence properties of light sources used in the projection lithographic systems strongly affect the photomask image quality reproduced on semiconductor wafer, because they determine the minimum resolvable feature size and the level of speckle i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::317d3b6aec31aabe945a4606c0c3a84f
https://doi.org/10.1016/0167-9317(90)90094-a
https://doi.org/10.1016/0167-9317(90)90094-a
Publikováno v:
Soviet Journal of Quantum Electronics. 20:33-36
An investigation was made of the spatial coherence of excimer lasers in different resonator geometries. Lasing with a spectral width of 5 nm was obtained in a scheme using a grating in the autocollimation regime and a four-prism telescope. A discussi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db88632c6a394c96b3bd341762d59b69
https://doi.org/10.1070/qe1990v020n01abeh004786
https://doi.org/10.1070/qe1990v020n01abeh004786
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 8:1488
In this report the experimental results of the resist silylation and O2‐plasma development are presented. The Soviet commercial novolac based photoresists of both positive and negative type and gas phase silylation in hexamethyldisilazane (HMDS) we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33c6f70bdaeae5896994cffcafffd1d1
https://doi.org/10.1116/1.585102
https://doi.org/10.1116/1.585102
Publikováno v:
Soviet Journal of Quantum Electronics. 8:695-700
Results are presented of a comparative study of the radiation spectra of spark and surface discharges in the 114–200 nm range. It is shown that both complete and incomplete surface discharges are a more efficient source of ultraviolet radiation for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3ceccceaf6eefbf582910969c46b0724
https://doi.org/10.1070/qe1978v008n06abeh010374
https://doi.org/10.1070/qe1978v008n06abeh010374
Autor:
S M Nikiforov, G P Kuz'min, S. I Andreev, D Yu Zaroslov, Nikolai V Karlov, E. A Zobov, P. N Dashuk, I. M Belousova, A M Prokhorov
Publikováno v:
Soviet Journal of Quantum Electronics. 6:931-934
The results are reported of an experimental investigation of the possibility of using a surface discharge plasma as a cathode in a pulse CO2 laser. A self-sustaining cavity discharge and laser action were achieved in a volume of 0.8 liter at a pressu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b76b8738a88528412ea599f7e7f3d275
https://doi.org/10.1070/qe1976v006n08abeh011788
https://doi.org/10.1070/qe1976v006n08abeh011788
Publikováno v:
Soviet Journal of Quantum Electronics. 17:806-808
A Michaelson interferometer was used in determination of longitudinal and transverse correlation functions of the radiation field of an XeCl laser. The coherence of the radiation emitted by this excimer laser was investigated. The coherence lengths,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d758e29bcb6546be27edc3db5e491af
https://doi.org/10.1070/qe1987v017n06abeh009364
https://doi.org/10.1070/qe1987v017n06abeh009364
Publikováno v:
Soviet Journal of Quantum Electronics. 8:1048-1050
The results are reported of a comparative study of ultraviolet spectra emitted from preionization sources designed for gas-discharge lasers. A comparison is made of the emission spectra of a complete surface (guided) discharge, a free spark, and a sp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a9eac920a049e5376ba7f910f036db24
https://doi.org/10.1070/qe1978v008n08abeh010612
https://doi.org/10.1070/qe1978v008n08abeh010612
Autor:
Yu B Konev, Nikolai V Karlov, D Yu Zaroslov, A M Prokhorov, I O Kovalev, R Sh Islamov, G P Kuz'min
Publikováno v:
Soviet Journal of Quantum Electronics. 12:1107-1109
A report is given of the results of detailed calculations of the specific output energy of cascade lasing due to 0001–0200–0110 transitions in CO2 molecules pumped by a pulsed gas discharge. The results are given as a function of the initial temp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54489833cdf027cc2719627669c70a96
https://doi.org/10.1070/qe1982v012n08abeh005809
https://doi.org/10.1070/qe1982v012n08abeh005809
Publikováno v:
Soviet Journal of Quantum Electronics. 15:1654-1656
The characteristic features of the use of pulsed ultraviolet lasers in photolithography were studied, including the high pulse power and monochromaticity of laser radiation. An experimental study was made of the photolithographic process carried out
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::abcdb04dc77e4e2bfb6b20f9f4514f56
https://doi.org/10.1070/qe1985v015n12abeh008096
https://doi.org/10.1070/qe1985v015n12abeh008096