Výsledky vyhledávání - "D V Kornachev"

Analysis of technical and economic market conditions affecting metrological equipment used in microelectronics

Publikováno v: Journal of Physics: Conference Series. 1515:022081

The issues of changing the requirements for metrology tools caused by scaling of integrated circuits are considered. Key factors leading to the increasing number of sensors are the need in the earliest possible detection of deviations of process para

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::495c728d019476a8f6ed26ba8060e553
https://doi.org/10.1088/1742-6596/1515/2/022081

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Rationale of the need to the development of semiconductor industry in Russia with the 28 nanometer semiconductor device fabrication node and below

Autor: Ya I. Petrenko, V. V. Frantsuzova, A. R. Avanesyan, A. V. Fomina, D. V. Kornachev

Publikováno v: IOP Conference Series: Materials Science and Engineering. 498:012043

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4e438ea005af3887b641950c8319d3e2
https://doi.org/10.1088/1757-899x/498/1/012043

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Akademický článek

Rationale of the need to the development of semiconductor industry in Russia with the 28 nanometer semiconductor device fabrication node and below.

Autor: A V Fomina, V V Frantsuzova, Ya I Petrenko, D V Kornachev, A R Avanesyan

Publikováno v: IOP Conference Series: Materials Science & Engineering; Apr2019, Vol. 498 Issue 1, p1-1, 1p

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