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Publikováno v:
Journal of Physics: Condensed Matter. 1:SB231-SB233
GaAs(100) surfaces were prepared by reactive ion etching using different etches and a series of plasma powers. In order to study the surface quality, ellipsometry and Raman scattering were applied. This combination allows damage at the surface and th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d38a845e821360ee39c713e14bdbdc45
https://doi.org/10.1088/0953-8984/1/sb/055
https://doi.org/10.1088/0953-8984/1/sb/055
