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Autor:
V E Matyushkov, G S Volkov, T. M. Makhviladze, D. Yu. Zaroslov, A A Shalapenok, K. A. Valiev, L. V. Velikov, D R Il'kaev
Publikováno v:
Soviet Journal of Quantum Electronics. 20:446-450
Experimental and mathematical modeling methods were used in an investigation of the influence of the degree of coherence at the entry to an optical projection system on the quality of the resultant images. It is shown that laser projection lithograph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::436236039b870118e7a13b91ca9143e0
https://doi.org/10.1070/qe1990v020n04abeh005953
https://doi.org/10.1070/qe1990v020n04abeh005953
