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Publikováno v:
Semiconductor Science and Technology. 11:1552-1557
Autor:
S. Y. Lee, H. J. Song, D. R. Allee, Khaldoon Abugharbieh, M. J. Rack, V. Khan, David K. Ferry
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:3720
An ambient scanning tunneling microscope is used to oxidize a thin Cr film to different oxidation states depending on the exposure conditions. These oxidation states have shown very different chemical and physical properties and can be used as positi