Zobrazeno 1 - 8
of 8
pro vyhledávání: '"D G Ageychenkov"'
Autor:
D G Ageychenkov, Mark O. Paskhin, Dmitry E. Burmistrov, Alexey D. Efimov, Sergey V. Gudkov, Andrey V. Kaziev, Egor V. Nagaev, D. V. Yanykin
Publikováno v:
Materials
Materials, Vol 14, Iss 6586, p 6586 (2021)
Materials; Volume 14; Issue 21; Pages: 6586
Materials, Vol 14, Iss 6586, p 6586 (2021)
Materials; Volume 14; Issue 21; Pages: 6586
On the basis of a direct current magnetron, a technology has been developed for producing nanoscale-oriented nanorods from zinc oxide on an acrylic polymer. The technology makes it possible to achieve different filling of the surface with zinc oxide
Autor:
A. V. Tumarkin, Kseniya A. Leonova, Andrey V. Kaziev, D. V. Kolodko, M. M. Kharkov, D G Ageychenkov
Publikováno v:
Vacuum. 156:48-54
The magnetron discharge with uncooled Cu target has been investigated in a wide range of parameters (magnetic field, power, Ar pressure). The evolution of discharge voltage and current has been measured yielding the transition time to stable gasless
Autor:
N S Sergeev, D G Ageychenkov, M. M. Kharkov, D. V. Kolodko, Andrey V. Kaziev, K. A. Leonova, A. V. Tumarkin
Publikováno v:
Journal of Physics: Conference Series. 2064:012061
The response of the ion current in the substrate region to the magnetic system configuration of a circular magnetron was studied during direct current sputtering of aluminum target. The unbalancing degree induced by changing of magnets’ positions w
Autor:
D. V. Kolodko, A. V. Tumarkin, K. A. Leonova, M. M. Kharkov, Andrey V. Kaziev, D G Ageychenkov
Publikováno v:
Journal of Instrumentation. 14:P10005-P10005
We studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250–2000 W).
Autor:
D. V. Kolodko, T. V. Stepanova, Andrey V. Kaziev, A. V. Tumarkin, D G Ageychenkov, M. M. Kharkov
Publikováno v:
Journal of Instrumentation. 14:C09004-C09004
Autor:
E. A. Meshcheryakova, A. A. Pisarev, D V Kolodko, Andrey V. Kaziev, D G Ageychenkov, A. V. Tumarkin
Publikováno v:
Journal of Physics: Conference Series. 830:012064
Ion fluxes on the surface of sample embedded in inductively coupled plasma have been studied in conditions typical for titanium alloy nitriding: total pressure 0.44 Pa, Ar/N2 = 70%/30%, and RF power 1500 W. The gas composition was independently monit
Publikováno v:
Journal of Physics: Conference Series. 747:012018
A simple magnetic sector mass analyser with an extraction system has been tested as a tool for monitoring ion contents in a low-pressure inductively coupled plasma in Ar, N2, and their mixtures. The spectrometer demonstrated mass-resolution suitable
Publikováno v:
Journal of Physics: Conference Series; 2017, Vol. 830 Issue 1, p1-1, 1p