Overlay performances of wafer scale nanoimprint lithography

Autor: Jérôme Rêche, Api Warsono, Anaïs De Lehelle D'Affroux, Jonas Khan, Sebastian Haumann, Andrea Kneidinger

Publikováno v: Novel Patterning Technologies 2023.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8cfcfc6fcd062b65ce679aa4ecd128fe
https://doi.org/10.1117/12.2655105

Nuclear microanalysis of lithium dispersion in LiFePO4 based cathode materials for Li-ion batteries

Autor: Habrioux, A., Surblé, S., Berger, P., Khodja, H., D’Affroux, A., Mailley, S., Gutel, T., Patoux, S.

Publikováno v: In Nuclear Inst. and Methods in Physics Research, B 1 November 2012 290:13-18

Replication of 3D patterns from a grayscale resist master by nanoimprint process

Autor: Liddle, J. Alexander, Ruiz, Ricardo, Warsono, Api, Fernandez Rodas, Diana, Rêche, Jérôme, De Lehelle d'Affroux, Anaïs, Berard Bergery, Sébastien

Publikováno v: Proceedings of SPIE; May 2023, Vol. 12497 Issue: 1 p124970A-124970A-7, 1124738p

Photo-dielectric polymer material characterization to improve reliability of 3D-IC packaging

Autor: L. Vignoud, Stephane Moreau, Nacima Alloutil, Anais D'Affroux, Pascal Chausse

Publikováno v: 2017 IEEE 19th Electronics Packaging Technology Conference (EPTC).

Spin-on passivation polymers are now widely used in Wafer Level Packaging (WLP) to comply with new stress and reliability requirements of 3D-IC process integrations. In a first study a robust spin-on dielectric polymer characterization protocol — a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2ceabb92c5afa30316515e958659a01d
https://doi.org/10.1109/eptc.2017.8277477

Nuclear microanalysis of lithium dispersion in LiFePO4 based cathode materials for Li-ion batteries

Autor: S. Mailley, Hicham Khodja, T. Gutel, Aurélien Habrioux, A. D’Affroux, Pascal Berger, Suzy Surblé, S. Patoux

Publikováno v: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2012, 290, pp.13-18. ⟨10.1016/j.nimb.2012.08.014⟩

This paper provides original characterization of battery electrodes by means of nuclear microanalysis. It presents a non-invasive method to investigate simultaneously the concentrations and the distributions of the different constituent elements of a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::13ad876d38107be9ffe0b8e3b2d8cfe0
https://hal.archives-ouvertes.fr/hal-00904478