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pro vyhledávání: '"Cyril Authier"'
Autor:
Cyril Authier, Richard Payling, Johann Michler, L.C. Pitchford, Max Aeberhard, Patrick Chapon, Thomas Nelis
Publikováno v:
Surface and Interface Analysis. 35:334-339
A detailed theory of relative sputtering rates for glow discharge optical emission spectroscopy (GDOES) is presented for the first time. The theory suggests that such sputtering rates should be nearly independent of plasma conditions. This is support
Autor:
Richard Payling, Max Aeberhard, Johann Michler, Cyril Authier, Patrick Chapon, Thomas Nelis, Leanne Pitchford
Publikováno v:
Surface & Interface Analysis: SIA; Apr2003, Vol. 35 Issue 4, p334, 6p