Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Cynthia A. Maley"'
Autor:
Mary Haviland, Robert Poole, Bryan G Moosman, Patrick O'Keeffe, Cynthia A. Maley, Timothy S. Dyer, Toshihiko Ishihara, Richard G. Morton, Herve A. Besaucele, Vladimir B. Fleurov, Walter D. Gillespie
Publikováno v:
SPIE Proceedings.
Since the introduction of the XLA-100 in January 2003, we have built, tested, and shipped a large number of XLA-100 MOPA lasers to microlithography scanner manufacturers. Some systems have already been installed at chip fabrication lines. To ensure p
Autor:
Donald G. Larson, Cynthia A. Maley, Hilary Heinmets, Palash P. Das, Igor V. Fomenkov, Ray Cybulski
Publikováno v:
SPIE Proceedings.
Chip makers are gearing up for 686-class micro-processors and 64 Mb production. These require producing < 0.30 micrometers critical features. They are also focusing on 256 Mb DRAMs that require below 0.25 micrometers design rules. Therefore, the shif
Autor:
Palash P. Das, Igor V. Fomenkov, Richard G. Morton, Ray Cybulski, Richard L. Sandstrom, Cynthia A. Maley, William N. Partlo
Publikováno v:
SPIE Proceedings.
In response to the requirement for higher wafer throughput and increased dosage accuracy in DUV lithography steppers and scanners, Cymer has developed a 1 kHz KrF laser optimized for this application. We shall describe its performance and design feat
Publikováno v:
Applied Optics. 33:4128
We describe techniques for making a diffractive optical element that produces a subdiffraction-limited spot size. We provide experimental verification, using a diffraction optical element that is constructed on a magneto-optic spatial light modulator
Conference
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