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pro vyhledávání: '"Custer, Joyce O."'
Publikováno v:
J. Vac. Sci. Technol. A 1 May 2024; 42 (3): 033408
We introduce a Bayesian optimization approach to guide the sputter deposition of molybdenum thin films, aiming to achieve desired residual stress and sheet resistance while minimizing susceptibility to stochastic fluctuations during deposition. Thin
Externí odkaz:
http://arxiv.org/abs/2405.03092
Autor:
Monti, Joseph M., Stewart, James A., Custer, Joyce O., Adams, David P., Depla, Diederik, Dingreville, Rémi
Publikováno v:
In Acta Materialia 15 February 2023 245
