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pro vyhledávání: '"Curry Scheirer"'
Autor:
Curry Scheirer, Boon Lay Tan, Kevin Peterlinz, Jacky Huang, Robert Jones, Shahin Zangooie, Stephen Morris, Dong Kyun Sohn, Heath Pois, JinPing Liu
Publikováno v:
AIP Conference Proceedings.
Graded Si1−xGex structures have been measured with good accuracy, stability and tool‐tool matching by utilizing different measurement methods in one system (Opti‐Probe®). The measurement methods utilized are (i) laser reflectivity versus angle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::026ea7de4889913997f7e6473d88daec
https://doi.org/10.1063/1.1622477
https://doi.org/10.1063/1.1622477
