Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate

Autor: Tsuyoshi Tsukada, Ryusei Takigawa, Yoshihiro Hasegawa, Muhammad Salman Al Farisi, Mitsuhiro Shikida

Publikováno v: Micromachines, Vol 14, Iss 1, p 42 (2022)

A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a cir

Externí odkaz: https://doaj.org/article/027800b1d64641b983c990d2a5d1ff2f

Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate.

Autor: Tsukada T; Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, Japan., Takigawa R; Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, Japan., Hasegawa Y; Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, Japan., Al Farisi MS; Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, Japan., Shikida M; Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, Japan.

Publikováno v: Micromachines [Micromachines (Basel)] 2022 Dec 24; Vol. 14 (1). Date of Electronic Publication: 2022 Dec 24.