Zobrazeno 1 - 10
of 35
pro vyhledávání: '"Cs. Dücső"'
Publikováno v:
Journal of Micromechanics and Microengineering. 17:1916-1922
The characteristics of wet chemical etching processes were compared for crystalline Si in aqueous solutions of pure NaOH and NaOH with added oxidizing agent NaOCl (sodium-hypochlorite). Due to the addition of NaOCl to the reference NaOH solution, the
Autor:
István Bársony, Attila Tóth, A. Pongrácz, Zs. Makkai, Cs. Dücső, Gábor Battistig, K. V. Josepovits
Publikováno v:
Journal de Physique IV (Proceedings). 132:133-136
Different Miller-indices Si crystal planes covered with thermally grown SiO 2 layer were heat treated in CO containing ambient for several hours. Our group has been demonstrated that this process resulting nanometre sized SiC crystallites at the Si s
Publikováno v:
Sensors and Actuators B: Chemical. :286-292
A Si based four element integrated calorimetric sensor was constructed for olfactory detection of hydrocarbon mixtures up to their lower explosion limit (LEL) concentration. In order to construct a four-wire, inherently explosion-proof transmitter, t
Publikováno v:
Sensors and Actuators B: Chemical. :96-101
Steady state and dynamic thermal behaviour of microfilament based calorimetric gas sensors is affected by geometry and the properties of structural materials. In this work, the effect of the thick porous catalyst matrix deposited on the hotplates is
Publikováno v:
Sensors and Actuators A: Physical. :620-626
Silicon based three-dimensional (3D) force sensor was designed and fabricated for detection of normal and shear forces. The sensor contains a rectangular rod emerging out of the centre of the membrane. The technology involves ion-implanted piezoresis
Publikováno v:
Sensors and Actuators A: Physical. 115:417-423
A calorimetric sensor for detection of gas velocity and flow direction was constructed by sacrificial porous silicon micromachining technique. The sensing element contains four temperature sensing resistors arranged symmetrically around a central fil
Publikováno v:
Sensors and Actuators B: Chemical. 103:442-447
IR thermal imaging in the wavelength range of 3m
Publikováno v:
Superlattices and Microstructures. 35:455-464
Micro-hotplates operated at elevated temperature form the basic element in several sensor devices, such as integrated calorimetric or Taguchi-type gas sensors and flow-rate sensors. In all of these applications thermal properties of the sensing eleme
Publikováno v:
Journal of Micromechanics and Microengineering. 12:425-429
Micro-pellistors and conductivity-type gas sensors are among the most promising candidates for the monolith integration of gas-sensing elements in olfactory gas detection. Both types have to be operated at elevated temperatures of 200–600 °C; ther
Publikováno v:
Sensors and Actuators A: Physical. 99:98-103
The present work is a study of the thermal properties of integrable micro-filaments. The realised structure is the key element of the targeted integrable micro-pellistor for catalytic gas sensing, therefore, its thermal characterisation is of crucial