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pro vyhledávání: '"Cristina Cheung"'
Autor:
Kenneth C. Johnson, Makoto Miyagi, Hsu-Ting Huang, Cristina Cheung, Apo Sezginer, Fred E. Stanke, Michelle L. Zimmerman, Bhanwar Singh, Gayathri Raghavendra
Publikováno v:
SPIE Proceedings.
Scatterometry provides a new, vibration-tolerant technique of overlay metrology. Gauge repeatability and reproducibility is improved by an order of magnitude over imaging-based overlay metrology. To measure the overlay of patterned layers A and B by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e412c10f315c64a76593cffa5a678d33
https://doi.org/10.1117/12.483668
https://doi.org/10.1117/12.483668
Publikováno v:
SPIE Proceedings.
With the rapid advances of deep submicron semiconductor technology, identifying defects is converted into a challenge for different modules in the fabrication of chips. Yield engineers often do bitmap on a memory circuit array (SRAM) to identify the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fee64f0daeb6c5175da076b46790c673
https://doi.org/10.1117/12.386531
https://doi.org/10.1117/12.386531
Autor:
Fred T K Cheung, Huicai Zhong, Robert B. Ogle, Brian J. MacDonald, Jeremias D. Romero, Jay Bhakta, Cyrus E. Tabery, Yun Wu, Arvind Halliyal, Cristina Cheung
Publikováno v:
Journal of The Electrochemical Society. 150:G785
Thin silicon nitride films (less than 20 nm) deposited on (100) silicon substrates via low pressure chemical vapor deposition (LPCVD) at three temperatures (730, 760, and 825°C) were analyzed by spectroscopic ellipsometry (SE), attenuated total refl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::903a8960986ab0a651e49e53a7d47d71
https://doi.org/10.1149/1.1624842
https://doi.org/10.1149/1.1624842
Publikováno v:
European Journal of Pediatrics. Mar2016, Vol. 175 Issue 3, p439-443. 5p.
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Autor:
Efrén O. Pérez
An incisive look at how America's continued demographic explosion has spurred the development of a new identity as people of color. For decades now, pundits and political scientists have been pointing to a major demographic change that's underway in
