Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering.

Autor: Courteille, C., Hollenstein, Ch., Dorier, J.-L., Gay, P., Schwarzenbach, W., Howling, A. A., Bertran, E., Viera, G., Martins, R., Macarico, A.

Publikováno v: Journal of Applied Physics; 8/15/1996, Vol. 80 Issue 4, p2069, 10p

Nanometer-scale silicon powders in RF silane plasmas

Autor: Hollenstein, Ch., Kroesen, G.M.W., Dorier, J.-L., Courteille, C., Sansonnens, L., Schwarzenbach, W., Magni, D., Howling, A.A., Tachibana, K., Watanabe, Y.

Publikováno v: ICRP-3/SPP-14 : 3rd International Conference on Reactive Plasmas and 14th Symposium on Plasma Processing : proceedings, January 21-24, 1997, Nara, Japan, vol. 4, 227-228
STARTPAGE=227;ENDPAGE=228;TITLE=ICRP-3/SPP-14 : 3rd International Conference on Reactive Plasmas and 14th Symposium on Plasma Processing : proceedings, January 21-24, 1997, Nara, Japan, vol. 4

The different phases of the powder formation in RF (oxygen-)silane plasmas are discussed. Mass spectrometry revealed large negative ions, which are supposed to act as powder precursors. The particle number density and particle sizes as determined by

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::8f6c489f6beefa78329795764593bfd2
https://research.tue.nl/nl/publications/793c756a-5d07-4fd1-a40b-f293e3f3db61

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Investigation of two negative hydrogen ion sources. Effect of the volume.

Autor: Bruneteau, A. M., Courteille, C., Leroy, R., Bacal, M.

Publikováno v: AIP Conference Proceedings; Jul1996, Vol. 380 Issue 1, p261-271, 11p