Electron beam induced current microscopy of silicon p–n junctions in a scanning transmission electron microscope.

Autor: Conlan, Aidan P., Moldovan, Grigore, Bruas, Lucas, Monroy, Eva, Cooper, David

Publikováno v: Journal of Applied Physics; 4/7/2021, Vol. 129 Issue 13, p1-9, 9p

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Thermally propagated Al contacts on SiGe nanowires characterized by electron beam induced current in a scanning transmission electron microscope.

Autor: Conlan AP; Univ. Grenoble Alpes, CEA-LETI, F-38000 Grenoble, France., Luong MA; Univ. Grenoble Alpes, CNRS-Institut Néel, 25 Avenue des Martyrs, F-38000 Grenoble, France., Gentile P; Univ. Grenoble Alpes, CEA, Grenoble INP, IRIG, PHELIQS, 17 av. des Martyrs, F-38000 Grenoble, France., Moldovan G; Point Electronic GmbH, Erich-Neuss-Weg 15, D-06120 Halle (Saale), Germany., Den Hertog MI; Univ. Grenoble Alpes, CNRS-Institut Néel, 25 Avenue des Martyrs, F-38000 Grenoble, France., Monroy E; Univ. Grenoble Alpes, CEA, Grenoble INP, IRIG, PHELIQS, 17 av. des Martyrs, F-38000 Grenoble, France., Cooper D; Univ. Grenoble Alpes, CEA-LETI, F-38000 Grenoble, France.

Publikováno v: Nanotechnology [Nanotechnology] 2021 Oct 29; Vol. 33 (3). Date of Electronic Publication: 2021 Oct 29.