Zobrazeno 1 - 10
of 1 098
pro vyhledávání: '"Cmos mems"'
Publikováno v:
IEEE Access, Vol 12, Pp 75061-75071 (2024)
This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacit
Externí odkaz:
https://doaj.org/article/9c1a5feefd9344caa14d9744bb050ebb
Akademický článek
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Autor:
Chien-Chung Tsai, Tung-Hon Yiu
Publikováno v:
Applied Sciences, Vol 14, Iss 1, p 326 (2023)
This work proposes a matching data science approach for the laser ablation quality, reb, the study of Si3N4 film based on supervised machine learning classifiers in the CMOS-MEMS process. The study demonstrates that there exists an energy threshold,
Externí odkaz:
https://doaj.org/article/d9d3b9f5c3224e64ab04fbf39bdf32d3
Autor:
Anurag Zope, Sheng-Shian Li
Publikováno v:
Frontiers in Mechanical Engineering, Vol 9 (2023)
Externí odkaz:
https://doaj.org/article/65a0a09a0b3b4699a3c4a6716b07cbf3
Akademický článek
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Publikováno v:
Sensors, Vol 23, Iss 11, p 5207 (2023)
The rational integration of many microfluidic chips and micropumps remains challenging. Due to the integration of the control system and sensors in active micropumps, they have unique advantages over passive micropumps when integrated into microfluid
Externí odkaz:
https://doaj.org/article/62b9aae418b445de907df27fcdb8bb9e
Publikováno v:
Micromachines, Vol 14, Iss 5, p 944 (2023)
This work reports the design, modelling, and simulation of a novel polymer MEMS gas sensor platform called a ring–flexure–membrane (RFM) suspended gate field effect transistor (SGFET). The sensor consists of a suspended polymer (SU-8) MEMS based
Externí odkaz:
https://doaj.org/article/49849940b74947cca07c4a002aec344e
Publikováno v:
IEEE Access, Vol 9, Pp 83149-83162 (2021)
In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching. During the study we have identified the main issues affe
Externí odkaz:
https://doaj.org/article/bbbdf345e719440daa3820f9778f13cf
Autor:
Chun-Pu Tsai, Wei-Chang Li
Publikováno v:
Frontiers in Mechanical Engineering, Vol 8 (2022)
CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability. For example, a 0.35-µm CMOS-based capacitively transduced comb
Externí odkaz:
https://doaj.org/article/45bf24aa7d3c40359fe2306c91f1c1eb
Autor:
Anurag Zope, Sheng-Shian Li
Publikováno v:
Frontiers in Mechanical Engineering, Vol 8 (2022)
Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequ
Externí odkaz:
https://doaj.org/article/e7cb3f291e2f4d1f95401b5e23a2fdb4