Opportunities and challenges brought by 3D-sequential integration

Autor: Benoit Sklenard, Bastien Giraud, Sebastien Thuries, Mikael Casse, Joris Lacord, Cm. Ribotta, V. Lapras, P. Acosta-Alba, O. Billoint, M. Mouhdach, N. Rambal, Pascal Besson, Francois Andrieu, Perrine Batude, Didier Lattard, Laurent Brunet, Gilles Sicard, Xavier Garros, Christoforos G. Theodorou, L. Brevard, Maud Vinet, V. Mazzocchi, P. Sideris, M. Ribotta, Claire Fenouillet-Beranger, F. Ponthenier, Pascal Vivet, Sebastien Kerdiles, G. Cibrario, J.M. Hartmann, Frank Fournel, Bernard Previtali, Frédéric Mazen, Claude Tabone

Publikováno v: 2021 IEEE International Interconnect Technology Conference (IITC)
2021 IEEE International Interconnect Technology Conference (IITC), Jul 2021, Kyoto, France. pp.1-1, ⟨10.1109/IITC51362.2021.9537356⟩

The aim of this paper is to present the 3D-sequential integration and its main prospective application sectors. The presentation will also give a synoptic view of all the key enabling process steps required to build high performance Si CMOS integrate

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5a896dcadaa6b8a425398da1a162204f
https://hal.archives-ouvertes.fr/hal-03434018