Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Cloin, Christian"'
Autor:
Liang, Ted, Kim, Seong-Sue, Brouns, Derk, Cloin, Christian, Hossain, Tahmid, Nedanovska, Elena
Publikováno v:
Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510L-127510L-8, 1147599p
Autor:
van de Kerkhof, Mark, van Empel, Tjarko, Lercel, Michael, Smeets, Christophe, van de Wetering, Ferdi, Nikipelov, Andrey, Cloin, Christian, Yakunin, Andrei, Banine, Vadim
Publikováno v:
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109570U-1-109570U-13, 13p
Publikováno v:
Proceedings of SPIE; 12/20/2023, Vol. 12751, p127510L-127510L-8, 1p
Autor:
Felix, Nelson M., Lio, Anna, van de Kerkhof, Mark, Waiblinger, Markus, Weber, Julia, Baur, Christof, Nikipelov, Andrey, Cloin, Christian
Publikováno v:
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090N-116090N-11, 11492922p
Particulate and molecular contamination control in EUV-induced H2-plasma in EUV lithographic scanner
Autor:
Soares, Carlos E., Wooldridge, Eve M., Matheson, Bruce A., van de Kerkhof, Mark, Galutschek, Ernst, Yakunin, Andrei, Cats, Selwyn, Cloin, Christian
Publikováno v:
Proceedings of SPIE; September 2020, Vol. 11489 Issue: 1 p114890K-114890K-17, 11374128p
Autor:
Goldberg, Kenneth A., van de Kerkhof, Mark, van Empel, Tjarko, Lercel, Michael, Smeets, Christophe, van de Wetering, Ferdi, Nikipelov, Andrey, Cloin, Christian, Yakunin, Andrei, Banine, Vadim
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10957 Issue: 1 p109570U-109570U-13, 10847444p
Autor:
Felix, Nelson M., Lio, Anna, van de Kerkhof, Mark, Waiblinger, Markus, Weber, Julia, Baur, Christof, Nikipelov, Andrey, Cloin, Christian
Publikováno v:
Proceedings of SPIE; 11/2/2020, Vol. 11609, p116090N-116090N-11, 1p