Zobrazeno 1 - 10
of 189
pro vyhledávání: '"Clark T.-C. Nguyen"'
Publikováno v:
2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0d6fbcadcba6ea0c9456c2ba071b2c2e
https://doi.org/10.1109/eftf/ifcs54560.2022.9850437
https://doi.org/10.1109/eftf/ifcs54560.2022.9850437
Publikováno v:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 66:192-217
This Part I of two papers introduces a design flow for micromechanical RF channel-select filters with tiny fractional bandwidths capable of eliminating strong adjacent channel blockers directly after the antenna, hence reducing the dynamic range requ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d90ed4371563ccfc2091f24f33c79647
https://doi.org/10.1109/tuffc.2018.2881727
https://doi.org/10.1109/tuffc.2018.2881727
Publikováno v:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
An ultraviolet (UV)-ozone treatment process capable of atomic-scale surface cleaning has enabled the highest measured room temperature Q and frequency-Q product (f-Q) for on-chip polysilicon acoustic resonators to date while also demonstrating an abi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b8f5fff30ccb17d473128f81e3b1c6d
https://doi.org/10.1109/mems51782.2021.9375184
https://doi.org/10.1109/mems51782.2021.9375184
Autor:
Clark T.-C. Nguyen, Qian-Yi Xie
Publikováno v:
2020 IEEE International Ultrasonics Symposium (IUS).
This work constitutes a first demonstration of a closed-loop oscillator referenced to a 20.4-µm-radius high-Q ra-dial-contour mode AlN capacitive-piezoelectric resonator that posts a measured phase noise of -87 dBc/Hz at 1-kHz offset from its 167.3-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::647cb30cc2bdd897f0e9ec92b781a8bd
https://doi.org/10.1109/ius46767.2020.9251799
https://doi.org/10.1109/ius46767.2020.9251799
Autor:
Alper Ozgurluk, Clark T.-C. Nguyen
Publikováno v:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF).
A micromechanical structure for on-chip strain sensing maps strain-induced gap changes to resonance frequency shifts while employing differential strategies to null out bias uncertainty, all towards repeatable measurement of sub-nm displacement chang
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e532fd5b5a7f3486255650639d52ecab
https://doi.org/10.1109/ifcs-isaf41089.2020.9234911
https://doi.org/10.1109/ifcs-isaf41089.2020.9234911
Publikováno v:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF).
The use of a stress-buffered array-composite of six $13.4-\mu \mathrm{m}$ radius capacitive-gap transduced radial-contour mode polysilicon micromechanical disk resonators with 36.1-nm electrode-to-resonator gaps has enabled a Pierce oscillator center
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::36b70274a363112fdf6adb9c745456e7
https://doi.org/10.1109/ifcs-isaf41089.2020.9234862
https://doi.org/10.1109/ifcs-isaf41089.2020.9234862
Publikováno v:
IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 67(7)
A 61-MHz Pierce oscillator constructed in 0.35- $\mu \text{m}$ CMOS technology and referenced to a polysilicon surface-micromachined capacitive-gap-transduced wine-glass disk resonator has achieved phase noise marks of −119 dBc/Hz at 1-kHz offset a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9b9f74fe65ee20ee6a39b76d20bfe1c0
https://pubmed.ncbi.nlm.nih.gov/31995483
https://pubmed.ncbi.nlm.nih.gov/31995483
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
Single-digit-nanometer electrode-to-resonator gaps have enabled 200-MHz radial-contour mode polysilicon disk resonators with motional resistance $R_{x}$ as low as $144\Omega$ while still posting $Q$ 's exceeding 10,000, all with only 2.5V dc-bias, Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::802a0a298cff37a5f8edc5c08f2a06e1
https://doi.org/10.1109/mems46641.2020.9056204
https://doi.org/10.1109/mems46641.2020.9056204
Autor:
Alper Ozgurluk, Clark T.-C. Nguyen
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
An on-chip strain measurement device is demonstrated that harnesses precision frequency measurement to precisely extract sub-nm displacements, allowing it to determine the residual strain in a given structural film with best-in-class accuracy, where
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::773334e726af2f79d342c6fd5da12a44
https://doi.org/10.1109/transducers.2019.8808299
https://doi.org/10.1109/transducers.2019.8808299
Publikováno v:
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
A capacitive-gap transduced flexural-mode square-plate resonator constructed in rapid-thermal-annealed (RTA'ed) ruthenium metal posts quality factors ( $Q$ 's) exceeding 5000 and an impressive transducer strength $C_{x}/C_{o}$ (equivalent to $k_{t}^{
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea7027eead01abac6f56430ef42be9d3
https://doi.org/10.1109/memsys.2019.8870623
https://doi.org/10.1109/memsys.2019.8870623