Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Cl2+N2 plasma"'
Autor:
Rong, Bifeng, van der Drift, Emile, van der Heijden, Rob W., Salemink, Huub W.M., Dobisz, Elizabeth A., Eldada, Louay A.
Publikováno v:
Proceedings of SPIE, 2006 vol. 6327
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Nanoengineering
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Nanoengineering
We have developed a reliable process to fabricate high quality 2D air-hole and dielectric column InP photonic crystals with a high aspect ratio on a STS production tool using ICP N2+Cl2 plasma. The photonic crystals have a triangular lattice with lat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::34b973fe31573782edb1cffb11e54028
https://doi.org/10.1117/12.680281
https://doi.org/10.1117/12.680281
Publikováno v:
Proceedings of SPIE, 2006 vol. 6327.
We have developed a reliable process to fabricate high quality 2D air-hole and dielectric column InP photonic crystals with a high aspect ratio on a STS production tool using ICP N2+Cl2 plasma. The photonic crystals have a triangular lattice with lat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dris___00893::9275742a8da2b78bbf83087448948c06
http://resolver.tudelft.nl/uuid:9287d9a0-915b-4c86-a1bc-ee4e3a33b44c
http://resolver.tudelft.nl/uuid:9287d9a0-915b-4c86-a1bc-ee4e3a33b44c