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pro vyhledávání: '"Clémence Bonnard"'
Autor:
P. Gardes, Warda Benhadjala, Jennifer Guillaume, Gwenael Le Rhun, Christel Dieppedale, Florence Sonnerat, Patrick Poveda, C. Billard, Clémence Bonnard, H. Sibuet, Philippe Renaux
Publikováno v:
International Symposium on Microelectronics. 2015:000256-000261
Integrated metal-insulator-metal (MIM) capacitors using sol-gel PZT doped with lanthanum (La, PLZT), manganese (Mn, PMZT) and niobium (Nb, PNZT) were successfully processed and characterized for tunable applications. Dielectric properties of doped-PZ