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pro vyhledávání: '"Cinzia M. Marcellino"'
Autor:
Salvatore Coffa, Francesco La Via, Alfio Russo, Simona Lorenti, Nicolò Piluso, Enzo Fontana, Cinzia M. Marcellino
Publikováno v:
Materials Science Forum. 858:418-421
In this paper the influence of point defects generated by the ion implantation process in 4H-SiC DIMOSFET has been studied in detail. The point defects generated by the source or body implantation process have been detected by micro-photoluminescence
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::70ab42a99e9ad0ad073feed7566e1f8e
https://doi.org/10.4028/www.scientific.net/msf.858.418
https://doi.org/10.4028/www.scientific.net/msf.858.418
