Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Chwa Sally"'
Autor:
S. Yang, Chwa Sally, Lim Kheeyong, Hong Feng, Liu Xinfu, Wu Yanping, Yu Xing, Ding Yongping, Nong Hao, Tang Bin, Shen Yanping, Wu Zhihua, Xiong Zhibin, Lim Louis
Publikováno v:
2008 9th International Conference on Solid-State and Integrated-Circuit Technology.
In this paper, we present the investigation of inverse narrow width effect (INWE) of 65 nm low-power process with dual gate oxide shapes. To evaluate the impact of STI process on narrow devices, we conducted different experiments in STI process steps
Autor:
Liu Xinfu, Lim Kheeyong, Wu Zhihua, Xiong Zhibin, Ding Yongping, Nong Hao, Wu Yanping, Shen Yanping, Tang Bin, Lim Louis, Chwa Sally, Yu Xing, Hong Feng, Yang, S.
Publikováno v:
2008 9th International Conference on Solid-State & Integrated-Circuit Technology; 2008, p1138-1141, 4p