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pro vyhledávání: '"Chunye Jiang"'
Autor:
Dongxu Ren, Huiying Zhao, Chupeng Zhang, Daocheng Yuan, Jianpu Xi, Xueliang Zhu, Xinxing Ban, Longchao Dong, Yawen Gu, Chunye Jiang
Publikováno v:
Sensors, Vol 16, Iss 4, p 538 (2016)
A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different l
Externí odkaz:
https://doaj.org/article/20c44c39c5bb4fd4b363d07d57eccc50
Publikováno v:
Proceedings of SPIE; 8/12/2017, Vol. 10448, p1-13, 13p
Publikováno v:
Optical Engineering; Jan2018, Vol. 57 Issue 1, p1-10, 10p