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pro vyhledávání: '"Chun-Jen J Wang"'
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 7:134-148
In this paper, we present an architecture for a run-to-run supervisory process control system that allows the engineer to tailor the form of control for specific processes. The architecture supports different degrees of control, from model-based cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f9673ed35694a6e52850e1ef413ba554
https://doi.org/10.1109/66.286850
https://doi.org/10.1109/66.286850
