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pro vyhledávání: '"Chun Yua Chen"'
Autor:
Chan Lon Yang, Chin Cheng Chien, Stan Yu, Balasubramanian Ramachandran, J.Y. Wu, Chin I. Liao, Chun Yua Chen
Publikováno v:
ECS Transactions. 58:159-162
The selective Epi of high quality with the high Ge of >50% has been demonstrated. The high quality Epi morphology can be obtained by modulating the Epi temperature to < 600C. The diamond shape Epi film with dislocation free can be observed by TEM. Th