Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Chun Chet Chew"'
Autor:
Chun Chet Chew, Chee Ghuan Tan, Mohammad Saleh Gorji, Kian Heng Goh, Singh Ramesh, Yew Hoong Wong
Publikováno v:
Applied Physics A. 122
Zirconium oxynitride (ZrOxNy) thin films were deposited on silicon (100) substrates by radio frequency-reactive magnetron sputtering in an argon–oxygen–nitrogen atmosphere. Post-deposition annealing (PDA) process was performed in argon ambient at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a4078760c4c0df48554b0b96363ef9d
https://doi.org/10.1007/s00339-016-9624-7
https://doi.org/10.1007/s00339-016-9624-7
