Výsledky vyhledávání - "Chun Quan, Yong"

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Polymer-like Organic Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using the Para-xylene Precursor as Low Dielectric Constant Interlayer Dielectrics for Multilevel Metallization

Autor: Chun Quan, Yong, Jongryang Joo, Jongryang Joo, Donggeun Jung, Donggeun Jung

Publikováno v: Japanese Journal of Applied Physics; March 1999, Vol. 38 Issue: 3 p1356-1356, 1p

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