Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Chuen-Uan Huang"'
Autor:
Chuen-Uan Huang, 黃俊源
87
In this study, design and fabrication of MEMS switches for microwave applications are investigated. A new process was designed to fabricated these MEMS switches. This process improves the stiction effect due to the capillary phenomenon which
In this study, design and fabrication of MEMS switches for microwave applications are investigated. A new process was designed to fabricated these MEMS switches. This process improves the stiction effect due to the capillary phenomenon which
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/75785157228770463368
Autor:
Samuel C. Pan, Michael Shien-Yang Wu, Mango C.-T. Chao, Tseng-Chin Luo, Chin. C. Hsia, Chuen-Uan Huang, Huan-Chi Tseng, Philip A. Fisher, Kuo-Tsai Li, Yuan-Yao Chang, Konrad K.-L. Young
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 24:280-293
As process technologies continually advance, local process variation has greatly increased and gradually become one of the most critical factors for integrated circuit manufacturing. To monitor local process variation, a large number of devices-under
Autor:
Chuen-Uan Huang, Tseng-Chin Luo, Konrad K.-L. Young, Chin. C. Hsia, Huan-Chi Tseng, Samuel C. Pan, Mango C.-T. Chao, Yuan-Yao Chang, Kuo-Tsai Li, Michael S.-Y. Wu
Publikováno v:
ITC
As process technologies continually advance, local process variation has greatly increased and gradually become one of the most critical factors for IC manufacturing. To monitor local process variation, a large number of DUTs (device-under-test) in c
Publikováno v:
Proceedings of IEEE Sensors, 2004..
We present a novel platform technology, EPIES (electroplating and isotropic etching silicon), for integrated RF-MEMS system-on-chip. Thick Cu structures were deposited by electroplating and released by using XeF/sub 2/ isotropic Si etching to remove
Publikováno v:
2005 Asia-Pacific Microwave Conference Proceedings.
A novel and simple kind of dual-band monopole MEMS membrane antenna fabricated on silicon suspended parylene membrane is presented. This parylene membrane is a flexible polymer film and it can be coated on various shapes and surfaces of materials or
Autor:
Tseng-Chin Luo, Chao, M.C.-T., Wu, M.S.-Y., Kuo-Tsai Li, Hsia, C.C., Huan-Chi Tseng, Chuen-Uan Huang, Yuan-Yao Chang, Pan, S.C., Young, K.K.-L.
Publikováno v:
2009 International Test Conference; 2009, p1-9, 9p
Publikováno v:
Japanese Journal of Applied Physics. 44:8356
A 2.4 and 5.2 GHz dual-band monopole antenna fabricated on a flexible parylene membrane for Bluetooth and wireless local area network (WLAN) modules was designed and fabricated. The measured results show a good antenna performance and agree very well
Publikováno v:
2005 Asia-Pacific Microwave Conference Proceedings; 2005, p4-4, 1p
Publikováno v:
Proceedings of IEEE Sensors, 2004; 2004, p615-615, 1p