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pro vyhledávání: '"Chuck May"'
Publikováno v:
Process and Materials Characterization and Diagnostics in IC Manufacturing.
Autor:
Raymond T. Lee, Jon D. Cheek, Michael Duane, John L. Nistler, Robert Dawson, Jim Fulford, Dirk J Wristers, Chuck May, Fred N. Hause, Daniel Kadoch, Bernard W. K. Ho, Brad T. Moore, Mark W. Michael, Ming-Yin Hao, Deepak K. Nayak, Bijnan Bandyopadhyay, Mark I. Gardner
Publikováno v:
SPIE Proceedings.
A family of CMOS processing technologies used to produce AMDs fifth and sixth generation microprocessors (K5 and K6) is described. Some of the issues that arose during the technology development and the transfer to manufacturing are also presented. T