Zobrazeno 1 - 1
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pro vyhledávání: '"Chuan-Yi Liao"'
Publikováno v:
Applied Surface Science. 578:152050
In the present study, Ag and Cu metal-assisted chemical etching (MACE) technique was used for etching single-crystalline silicon at 15–25 °C, followed by post-processing with the HF/HNO3/H2O solution. Further, the relationship between the shape of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e89f01b30f7a7aeba72bf03f2a3dc99e
https://doi.org/10.1016/j.apsusc.2021.152050
https://doi.org/10.1016/j.apsusc.2021.152050
