Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Christopher Welham"'
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
This paper reports gravity and film stress effects on the up and down motion of a MEMS deformable mirror, actuated electrostatically by an array of pistons. To keep the inter-electrode gap small for efficient electrostatic force actuation, the piston
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c38ccf2da9f89e53d637db1dc465798
https://doi.org/10.1109/transducers50396.2021.9495655
https://doi.org/10.1109/transducers50396.2021.9495655
Autor:
Shuangqin Liu, Zouhair Sbiaa, Aveek N. Chatterjee, Hyun-Kee Chang, Alexandre Sinding, Stephen Breit, Ibrahim M. Elfadel, Ilker Ender Ocak, Wajih U. Syed, Jun Yan, Christopher Welham, Arnaud Parent
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6dc1802a8fa65d875560e9d789e5bdb
https://doi.org/10.1109/transducers.2017.7994487
https://doi.org/10.1109/transducers.2017.7994487
Autor:
Christopher Welham, Wajih U. Syed, Zouhair Sbiaa, Ilker Ender Ocak, Hyun-Kee Chang, Stephen Breit, Jun Yan, Ibrahim M. Elfadel, Alexandre Sinding, Shuangqin Liu, Aveek N. Chatterjee
Publikováno v:
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
A number of corrections to the well-known squeezed-film gas damping model are required to get accurate results for MEMS. This paper reports on the implementation and validation of a corrected squeezed-film damping (SFD) simulation for common MEMS str
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9dc164a200e570ae055d15c9602b1bb2
https://doi.org/10.1109/memsys.2017.7863551
https://doi.org/10.1109/memsys.2017.7863551
Autor:
Stephane Rouvillois, Mark Edward Mcnie, Christopher Welham, David J. Combes, Michael Kraft, Stephen Breit, David Oury King
Publikováno v:
Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B.
A general method of modeling and simulating a micro-machined inertial sensor under closed-loop control by a sigma-delta modulator is presented. The model of the mechanical subsystem captures all 6 mechanical degrees of freedom and the complex electro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b820fa822268780ba136413f40d93bb7
https://doi.org/10.1115/imece2008-68939
https://doi.org/10.1115/imece2008-68939