Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Christopher R. Stockbridge"'
Publikováno v:
Journal of Modern Optics. 59:1049-1055
We describe experiments conducted with two deformable mirrors (DMs) at fixed locations in an optical microscope imaging system. In this configuration, the DM shapes are controlled to provide 2.5× zoom capability, to allow dynamic focus control and t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c497771a96c96d7c52c016e63126ab9d
https://doi.org/10.1080/09500340.2012.681708
https://doi.org/10.1080/09500340.2012.681708
Autor:
Euan Ramsay, Bennett B. Goldberg, M.S. Unlu, Thomas G. Bifano, F. H. Köklü, Yang Lu, Abdulkadir Yurt, Christopher R. Stockbridge
Publikováno v:
Microelectronics Reliability. 52:2120-2122
Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are very susceptible to spherical aberrations intr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bb99d227378730c8286930fa504ea974
https://doi.org/10.1016/j.microrel.2012.06.026
https://doi.org/10.1016/j.microrel.2012.06.026
Autor:
F. H. Köklü, Yang Lu, Euan Ramsay, Bennett B. Goldberg, Abdulkadir Yurt, M.S. Unlu, Christopher R. Stockbridge
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper demonstrates a differential dual-phase interferometric imaging method in which the reflected probe beam modulated weakly by the charge carriers is mixed separately with two reference beams with a known phase shift in between. Performing a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9138a3a0badcfcb1b4e6146b7174a01b
https://doi.org/10.31399/asm.cp.istfa2012p0172
https://doi.org/10.31399/asm.cp.istfa2012p0172
Autor:
Euan Ramsay, Bennett B. Goldberg, Thomas G. Bifano, M.S. Unlu, Christopher R. Stockbridge, Abdulkadir Yurt, Yang Lu, F. H. Köklü
Publikováno v:
Scopus-Elsevier
Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are susceptible to spherical aberration introduced
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f161480c0f1f66a940c4d6e3513ad48d
https://doi.org/10.31399/asm.cp.istfa2012p0006
https://doi.org/10.31399/asm.cp.istfa2012p0006
Autor:
Samuel M. Hoffman, Kimani C. Toussaint, Thomas G. Bifano, Yang Lu, John Moore, Richard G. Paxman, Christopher R. Stockbridge
Publikováno v:
ResearcherID
We demonstrate steady-state focusing of coherent light through dynamic scattering media. The phase of an incident beam is controlled both spatially and temporally using a reflective, 1020-segment MEMS spatial light modulator, using a coordinate desce
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ea2c9a913d15eaf6a6370e3995c5f35
https://pubmed.ncbi.nlm.nih.gov/22772205
https://pubmed.ncbi.nlm.nih.gov/22772205
Autor:
Aaron J. Berliner, Richard G. Paxman, Yang Lu, Kimani C. Toussaint, Santosh Tripathi, John Moore, Thomas G. Bifano, Christopher R. Stockbridge
Publikováno v:
MEMS Adaptive Optics VI.
A reflective microelectromechanical mirror array was used to control the intensity distribution of a coherent beam that was propagated through a strongly scattering medium. The controller modulated phase spatially in a plane upstream of the scatterin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a72d422af1abc70e24f20a0c838ae87
https://doi.org/10.1117/12.911384
https://doi.org/10.1117/12.911384
Autor:
Christopher R. Stockbridge, Euan Ramsay, Bennett B. Goldberg, Abdulkadir Yurt, Yang Lu, Selim Unlu
Publikováno v:
Frontiers in Optics 2012/Laser Science XXVIII.
We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1fe2fda34e424a9fa7959968c069873e
https://doi.org/10.1364/fio.2012.ftu3a.7
https://doi.org/10.1364/fio.2012.ftu3a.7
Autor:
Euan Ramsay, Bennett B. Goldberg, Christopher R. Stockbridge, Abdulkadir Yurt, M. Selim Ünlü, Yang Lu, Thomas G. Bifano
Publikováno v:
Frontiers in Optics 2012/Laser Science XXVIII.
We have developed a wavefront precompensation technique in aplanatic SIL imaging to increase the tolerance of substrate thickness for IC inspection. Spherical aberrations due to the thickness error are corrected using a MEMS deformable mirror.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b44f63cc0bddd95d1eb320512e4acbe4
https://doi.org/10.1364/fio.2012.ftu3a.25
https://doi.org/10.1364/fio.2012.ftu3a.25
Autor:
Euan Ramsay, Bennett B. Goldberg, Thomas G. Bifano, M.S. Unlu, Christopher R. Stockbridge, F. H. Köklü, Jerome Mertz, Abdulkadir Yurt, Yang Lu
Publikováno v:
Scopus-Elsevier
We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrica
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::87cc0402e744e778e07f8ed354e140aa
https://doi.org/10.31399/asm.cp.istfa2011p0026
https://doi.org/10.31399/asm.cp.istfa2011p0026
Autor:
Samuel M. Hoffman, Thomas G. Bifano, Yang Lu, Christopher R. Stockbridge, Andrew P. Legendre, Jason B. Stewart
Publikováno v:
SPIE Proceedings.
A prototype optical system for compact, high-speed zooming is described. The system is enabled by a pair of MEMS deformable mirrors (DMs), and is capable of high-speed optical zoom without translation of components. We describe experiments conducted
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0cec8ecbb34cb5a252865d683572ee75
https://doi.org/10.1117/12.874207
https://doi.org/10.1117/12.874207