Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Christopher O'Donohue"'
Autor:
Khalil A. Abboud, Roman Y. Korotkov, Richard O. Bonsu, Christopher O’Donohue, Hankook Kim, Timothy J. Anderson, Lisa McElwee-White
Publikováno v:
Inorganic Chemistry. 54:7536-7547
The soluble bis(fluoroalkoxide) dioxo tungsten(VI) complexes WO2(OR)2(DME) [1, R = C(CF3)2CH3; 2, R = C(CF3)3] have been synthesized by alkoxide-chloride metathesis and evaluated as precursors for aerosol-assisted chemical vapor deposition (AACVD) of
Autor:
J. C. Revelli, Arijit Koley, Timothy J. Anderson, Christopher O’Donohue, K. R. McClain, Lisa McElwee-White
Publikováno v:
ECS Journal of Solid State Science and Technology. 4:N3180-N3187
Deposition of high quality WNxCy barrier films at very low temperature using aerosol-assisted chemical vapor deposition (AACVD) is reported. The single-source tungsten nitrido complex, WN(NEt2)3, was designed to reduce the temperature required for WN
Autor:
Arijit Koley, Khalil A. Abboud, Christopher O’Donohue, Timothy J. Anderson, Lisa McElwee-White, Joseph C. Revelli, Richard O. Bonsu, K. Randall McClain
Publikováno v:
Journal of the American Chemical Society. 136:1650-1662
Tungsten nitrido complexes of the form WN(NR2)3 [R = combinations of Me, Et, (i)Pr, (n)Pr] have been synthesized as precursors for the chemical vapor deposition of WN(x)C(y), a material of interest for diffusion barriers in Cu-metallized integrated c
Autor:
Hankook Kim, Lisa McElwee-White, Timothy J. Anderson, Ashley A. Ellsworth, Richard O. Bonsu, Christopher O’Donohue, Khalil A. Abboud, Amy V. Walker, K. Randall McClain, Roman Y. Korotkov
Publikováno v:
Dalton Trans.. 43:9226-9233
The partially fluorinated oxo-alkoxide tungsten(VI) complexes WO(OR)4 [4; R = C(CH3)2CF3, 5; R = C(CH3)(CF3)2] have been synthesized as precursors for chemical vapour deposition (CVD) of WOx nanocrystalline material. Complexes 4 and 5 were prepared b
Autor:
Zhiwei Shi, Khalil A. Abboud, Amy V. Walker, Lisa McElwee-White, K. Randall McClain, Timothy J. Anderson, Christopher O’Donohue
Publikováno v:
European Journal of Inorganic Chemistry. 2012:4579-4584
The WNx precursor WN(NMe2)3 was prepared from WN(OtBu)3 and Zr(NMe2)4 by using an amide/alkoxide exchange reaction. Structural analysis of WN(NMe2)3 revealed an overall pseudo-tetrahedral geometry with a distortion towards trigonal pyramidal. Aerosol
Autor:
Hankook Kim, Timothy J. Anderson, Roman Y. Korotkov, Christopher O’Donohue, Lisa McElwee-White, Richard O. Bonsu
Publikováno v:
ACS applied materialsinterfaces. 7(4)
Aerosol-assisted chemical vapor deposition (AACVD) of WOx was demonstrated using the oxo tungsten(VI) fluoroalkoxide single-source precursors, WO[OCCH3(CF3)2]4 and WO[OC(CH3)2CF3]4. Substoichiometric amorphous tungsten oxide thin films were grown on