Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Christopher M. Bottoms"'
Publikováno v:
The Journal of Physical Chemistry B. 126:6562-6574
Polymeric chemically amplified resists (CARs) are critical materials for high-throughput lithographic processes. A photoactivated acid-anion catalyst changes the polymer's solubility via a deprotection reaction, which enables pattern development thro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6af0000ad3f77bfc1fda7d58f4fbd131
https://doi.org/10.1021/acs.jpcb.2c03775
https://doi.org/10.1021/acs.jpcb.2c03775
Publikováno v:
Advances in Patterning Materials and Processes XL.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0dc7c6d005bcc3b9d3c5d45aeef2fb54
https://doi.org/10.1117/12.2656952
https://doi.org/10.1117/12.2656952
Publikováno v:
Macromolecules. 54:1912-1925
The acid-catalyzed deprotection of glassy polymer resins is an important process in semiconductor lithography. Studies have shown that the reaction kinetics in these materials is controlled by slow...
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96fc9a64b7b7ee39f04d2bb06171c660
https://doi.org/10.1021/acs.macromol.0c02052
https://doi.org/10.1021/acs.macromol.0c02052
Publikováno v:
Advances in Patterning Materials and Processes XXXIX.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d0767ce566dc298e3efefa50a745c64
https://doi.org/10.1117/12.2613355
https://doi.org/10.1117/12.2613355
Publikováno v:
Advances in Patterning Materials and Processes XXXVIII.
Catalyst diffusion is a critical component of the pattern formation process in chemically amplified resists (CARs). In this study, we used a concerted experimental and modeling effort to examine diffusion of an inert catalyst analogue (sodium triflat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1ff577c48afa9c575f531a780e59c89
https://doi.org/10.1117/12.2581367
https://doi.org/10.1117/12.2581367