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pro vyhledávání: '"Christopher Bevis"'
Autor:
Anne-Laure Charley, Jenny Goulden, Elis Newham, Christopher Bevis, Lei Feng, Mircea Dusa, Alain Moussa, Andrew D. L. Humphris
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
Atomic Force Microscopy (AFM) is a proven technique applied in research environments, most commonly in materials science and biological research. More recently, requirements in semiconductor manufacturing advocate that probe microscopy has potential