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pro vyhledávání: '"Christophe Salagnon"'
Autor:
Christophe Salagnon, Marc Mikolajczak, Joel Metz, Nicolas Chojnowski, R. Bouyssou, Alice Pelletier, Yoann Blancquaert, Frank Sundermann, Anna Phillips, Jean de Caunes, E. Batail, Thierry Devoivre, Bertrand Le Gratiet, Lionel Thevenon, Didier Gueze, Ahmed Oumina, Anne Strapazzon, Olivier Belmont, Jean Massin, Arthur Pelissier, E. Bernard, Marie-Pierre Baron, Benedicte Bry, Fabrice Bernard-Granger, Vincent Morin
Publikováno v:
SPIE Proceedings.
The main difficulty related to DoseMapper correction is to generate an appropriate CD datacollection to feed DoseMapper and to generate DoseRecipe in a user friendly way, especially with a complex process mix. We could heavily measure the silicon and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d089f02424e166e878645e3864d8d22d
https://doi.org/10.1117/12.911882
https://doi.org/10.1117/12.911882
