Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Christophe Castille"'
Publikováno v:
Scopus-Elsevier
Usually, resonating cantilevers come from silicon technology and are generally activated with pure bending mode. In this work, we suggest to combine high sensitive cantilever structure with full self-actuated piezoelectric thick-film for high electri
Publikováno v:
Applied Physics Letters. 96:154102
We report on the fabrication of a self-actuated resonant-microsensor, based on a thick-film piezoelectric cantilever, dedicated to either (bio)chemical detection in gaseous or liquid media or fluid characterization. The aim of this paper is to demons
Autor:
Christophe Castille, Claude Lucat, Mario Maglione, Isabelle Dufour, Claude Pellet, Hélène Debéda
Publikováno v:
Procedia Chemistry: Proceedings of XXIII Eurosensors
Eurosensors 2009
Eurosensors 2009, 2009, Lausanne, Switzerland. pp.971-974, ⟨10.1016/j.proche.2009.07.242⟩
Eurosensors 2009
Eurosensors 2009, 2009, Lausanne, Switzerland. pp.971-974, ⟨10.1016/j.proche.2009.07.242⟩
High gas sensitivity, expected when using the unusual longitudinal vibration mode of PZT cantilever for such application, is based on its higher resonant frequency when compared to transversal bending mode. For this purpose, a new PZT cantilever stru