Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Christian van Os"'
Autor:
Tom Hoogenboom, Hans Van Der Laan, Erik Byers, Frans Blok, Craig Hickman, Oscar Noordman, Rene Carpaij, Troy Gugel, Sander Stegeman, Jouke Krist, Youri van Dommelen, Christian van Os, Jan van Schoot
Publikováno v:
SPIE Proceedings.
Meeting a specific CD uniformity roadmap becomes more and more difficult as different budget components affecting CD uniformity fail to meet their requirements. For example, reticle manufacturing is at the edge of its potential, and hotplates impact
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2731b2d8447075b16c5e3361f4803a1b
https://doi.org/10.1117/12.602129
https://doi.org/10.1117/12.602129
Autor:
Robert John Socha, Uwe Hollerbach, J. Fung Chen, Yuri Granik, Luigi Capodieci, Nicolas B. Cobb, Juan Andres Torres, Olivier Toublan, Christian van Os
Publikováno v:
SPIE Proceedings.
As advanced source illumination options become available for production implementation, at the 150 nm and 130 nmtechnology nodes, non-linear effects are introduced in the design shrink-path. In previous technologies, in particular 250 and180 nm, part
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca31719453cc9c00eb26ea602c2353ff
https://doi.org/10.1117/12.395751
https://doi.org/10.1117/12.395751