Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Christian R. Musil"'
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :428-432
Focused ion beam (FIB) milling has been applied to improve and tailor the emission characteristics of Fabry-Perot type semiconductor lasers. Multi-mode commercial lasers operating at 780 nm were modified by sputtering 1 μ m × 1 μ m depressions int
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9fb17eb15f1426199187e542bf0bf53f
https://doi.org/10.1016/s0168-583x(96)00968-8
https://doi.org/10.1016/s0168-583x(96)00968-8
Publikováno v:
Journal of Applied Physics. 80:3727-3733
The dependence of the retained lattice damage upon dose rate was investigated by focused ion beam (FIB) implantation of 210 keV Si++ into GaAs at room temperature. The as‐implanted and postannealed states were characterized by ion channeling and Ha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66656d370c8296c4fb1b5c0dc624d221
https://doi.org/10.1063/1.363323
https://doi.org/10.1063/1.363323
Autor:
H.M. Cronson, J.F. Devine, A. Chu, Henri J. Lezec, S. Soares, Christian R. Musil, M.N. Soloman
Publikováno v:
Conference Record AUTOTESTCON '92: The IEEE Systems Readiness Technology Conference.
The authors describe a vision of unambiguous fault isolation on RF equipment and enabling critical technologies. The overall goal is reduction of logistic support and maintenance cost of RF subsystems. Savings will be achieved through reduced false a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::47c376ecfaae6bdd61778616941d5b93
https://doi.org/10.1109/autest.1992.270112
https://doi.org/10.1109/autest.1992.270112
Publikováno v:
SPIE Proceedings.
The repair of an opaque defect by focused ion beam milling is compromised by non-idealities of the repair process, which include an error in the placement of the repaired edge, over-etching and implantation of gallium into the quartz substrate, and t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a9609cefd635384276f29302576bf72e
https://doi.org/10.1117/12.467434
https://doi.org/10.1117/12.467434
Autor:
S. Etchin, D. Vignaud, John Melngailis, Dimitri A. Antoniadis, K. S. Liao, Christian R. Musil
Publikováno v:
Applied Physics Letters. 60:2267-2269
The lateral distribution of focused‐ion‐beam implanted Be atoms in GaAs has been studied by measuring the electrical resistivity in grating structures. The gratings were implanted at 230 and 260 keV with periods from 0.04 to 3 μm oriented both p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::285eadcb560320fb6d7dc71b43b0a153
https://doi.org/10.1063/1.107050
https://doi.org/10.1063/1.107050
Publikováno v:
SPIE Proceedings.
We present the results of a DARPA sponsored study on the application of Focused Ion Beam (FIB) systems to metrology in advanced lithography for production and process development. Data on top-down measurements, on the effects of FIB imaging, and on m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::616660589042f3c75f41688818a6363a
https://doi.org/10.1117/12.386504
https://doi.org/10.1117/12.386504
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13:2781
The fundamental characteristic of nanotechnology is the fabrication of structures with molecular dimensions. In connection with a novel immunosensor, a specifically tailored molecular environment is required which combines immobilized biochemical rec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f8e22788ef3f21e49f8b98dd4abcc9d0
https://doi.org/10.1116/1.588265
https://doi.org/10.1116/1.588265
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:581
The lateral distribution of focused‐ion‐beam implanted Si and Be atoms has been studied by measuring the electrical resistivity in grating structures. The gratings which were oriented perpendicular to the direction of the current flow were implan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1bd3210a99671a82b697b32a16b8742c
https://doi.org/10.1116/1.586804
https://doi.org/10.1116/1.586804
Autor:
Christian R. Musil, John Melngailis, M. I. Shepard, Dimitri A. Antoniadis, Henri J. Lezec, James E. Murguia
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 8:1374
Combining optical lithography and focused ion beam (FIB) patterning in direct‐write device and circuit fabrication by generating large features optically and small features with the FIB can significantly reduce beam writing time. Our approach to FI
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::153e0790e1c540b5de20b7d485acd470
https://doi.org/10.1116/1.585081
https://doi.org/10.1116/1.585081
Autor:
Hans W. Lehmann, Celestino Padeste, Christian R. Musil, Sebastian Kossek, Jens Gobrecht, Louis Tiefenauer
Publikováno v:
Scopus-Elsevier
A process to structure gold electrodes with nanometer-sized dimensions for biosensor applications has been developed. Latex spheres (60 nm diam) are used as a masking material during the evaporation of a gold film onto a Si/SiO 2 substrate. Openings
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::03083fc06afc1333a30e7d3c9c7fffc1
http://www.scopus.com/inward/record.url?eid=2-s2.0-0030405277&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0030405277&partnerID=MN8TOARS
