Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Christian Haigermoser"'
Autor:
Yong Gen He, Christian Haigermoser, Mei Sheng Zhou, Wei Lu, Huan Xin Liu, Jia Lei Liu, Feng Liu, Jin Gang Wu
Publikováno v:
Solid State Phenomena. 255:18-21
Tetramethylammonium hydroxide (TMAH) is a common etchant for Sigma shape formation in IC manufacturing. The impact of oxygen dissolved in TMAH solution on process was studied in this paper. A novel O2 gas injector was developed to improve the process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::000add821e8a299903f62434eca1bd61
https://doi.org/10.4028/www.scientific.net/ssp.255.18
https://doi.org/10.4028/www.scientific.net/ssp.255.18
Publikováno v:
2018 China Semiconductor Technology International Conference (CSTIC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e73380405377ae0416c75f0212e52b0a
https://doi.org/10.1109/cstic.2018.8369228
https://doi.org/10.1109/cstic.2018.8369228
Publikováno v:
ECS Transactions. 69:139-144
Abstract Continuous device shrinkage beyond 3X and 2X nm increases the number of critical clean processes in semiconductor manufacturing. In order to avoid cross contamination from reclaimed chemistry, single-pass chemistry has become more commonly u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f400ac81a471beca2b50f6902dd9bb31
https://doi.org/10.1149/06908.0139ecst
https://doi.org/10.1149/06908.0139ecst
Autor:
Christian Haigermoser
Publikováno v:
Experiments in Fluids. 47:145-157
The present paper describes a method to derive information about the acoustic emission of a flow using particle image velocimetry (PIV) data. The advantage of the method is that it allows studying sound sources, the related flow phenomena and their a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0729d347c35997125cb3b5d9a717633d
https://doi.org/10.1007/s00348-009-0642-5
https://doi.org/10.1007/s00348-009-0642-5
Autor:
Ismail Hakki Sezal, Christian Aalburg, Alexander Simpson, Vittorio Michelassi, Giuseppe Sassanelli, Christian Haigermoser
Publikováno v:
Volume 7: Turbomachinery, Parts A, B, and C.
A full-annulus cascade for radial compressor stator development has been designed and commissioned. The cascade has been developed for the rapid screening of novel stator concepts to facilitate risk mitigation in the early design phase and the valida
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0f0d6e6b1c0fcd6d1ead9d70c5a4a035
https://doi.org/10.1115/gt2011-46834
https://doi.org/10.1115/gt2011-46834
MSSP proteins have been identified by their binding to an upstream element of c-myc. Independently, two different approaches yielded two cDNA clones highly homologous to the MSSP cDNAs, suggesting an involvement of MSSP in the regulation of the cell
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bf015f3888215c61286b01d8218b9051
https://europepmc.org/articles/PMC146151/
https://europepmc.org/articles/PMC146151/
Publikováno v:
ECS Meeting Abstracts. :774-774
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca0ffdca4abbd9c5758a9af2445ebb48
https://doi.org/10.1149/ma2005-02/20/774
https://doi.org/10.1149/ma2005-02/20/774