Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Chris Harbinson"'
Autor:
James P. DeYoung, Mark Wagner, Chris Harbinson, Amy E. Zweber, Ruben G. Carbonell, Merrick Miles
Publikováno v:
SPIE Proceedings.
A novel method for the development of standard EUV photoresists in CO 2 using CO 2 compatible salts (CCS) is described and examined using a quartz crystal microbalance (QCM) technique in CO 2 . The fundamental steps of this development process are pr
Publikováno v:
SPIE Proceedings.
Direct development of EUV resists in homogeneous carbon dioxide (CO2) solutions containing CO2 compatible salts (CCS) has been demonstrated. These CCS complexes have been designed and prepared such that the anion and/or the cation of the salt contain
Autor:
Evangelos Gogolides, Chris Harbinson, James P. DeYoung, George P. Patsis, Vassilios Constantoudis, Mark I. Wagner
Publikováno v:
SPIE Proceedings.
Line Width Roughness (LWR) of resists constitutes one of the main obstacles in the race of further shrinking the feature dimensions of fabricated devices. Thus, the reduction and control of LWR is one of the biggest challenges of next generation lith
Publikováno v:
SPIE Proceedings.
Pattern collapse and line width roughness (LWR) are two issues expected to become increasingly important as feature sizes approach those expected from EUV lithography. The unique physical properties of supercritical CO2 (low viscosity, zero surface t