Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Chris Hakala"'
Publikováno v:
Teaching & Learning Inquiry: The ISSOTL Journal, Vol 10 (2022)
A book review of A Pocket Guide to Online Teaching: Translating the Evidence-Based Model Teaching Criteria, by Aaron Richmond, Regan Gurung, and Guy Boysen.
Externí odkaz:
https://doaj.org/article/3c4c35099b5b4944be1f34b38fe50621
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c21afbd280aa44721aae1b4aa2cfd7be
https://doi.org/10.1117/12.2658795
https://doi.org/10.1117/12.2658795
Publikováno v:
Microscopy and Microanalysis. 27:60-61
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2d5bf74d8fcc8bc066585f6745a3031
https://doi.org/10.1017/s1431927621000817
https://doi.org/10.1017/s1431927621000817
Autor:
Chris Hakala, Anne Kenslea, Michael Strauss, Laurens Kwakman, Hayley Johanesen, Hans Mertens, Kathy Barla, Werner Boullart, Yong Kong Siew
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIII.
The scaling of device dimensions has resulted in a need for high resolution metrology techniques capable of measuring small CDs with a high degree of precision and accuracy. Scanning transmission electron microscopy (STEM) has previously been demonst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e06fdea4d5cb9bcfa64d35d85549fce
https://doi.org/10.1117/12.2514995
https://doi.org/10.1117/12.2514995
Autor:
John Fretwell, Haiyan Tan, Chris Hakala, Timothy A. Johnson, Raghaw Rai, Irene Brooks, Chris Kang, Ahmad Katnani, Laurent Dumas, Yinggang Lu, Weihao Weng, Zhenxin Zhong
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Developments in the semiconductor industry are driving the need for new methods to characterize smaller 3D devices in a productive and reproducible way. The automation of sample preparation, TEM imaging, and offline CD metrology is able to provide sa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b91e8d8f026942d1806756a3776c3069
https://doi.org/10.1109/asmc.2018.8373156
https://doi.org/10.1109/asmc.2018.8373156
Autor:
Jack Hager, Laurent Dumas, John Fretwell, Yinggang Lu, Haiyan Tan, Weihao Weng, Anne Kenslea, Chris Kang, Chris Hakala, Zhenxin Zhong, Irene Brooks
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Few existing in-line CD metrology techniques can match the sub-surface 3D analytical capability provided by transmission electron microscopy (TEM). Recent developments in sample preparation and analysis have resulted in a fully automated TEM workflow
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::453c2d36e3d85f821b1385b7985d0142
https://doi.org/10.1109/asmc.2018.8373170
https://doi.org/10.1109/asmc.2018.8373170
Autor:
Chris Hakala
Publikováno v:
Psychology and Behavioral Science International Journal. 4
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::83ad1a658150b85be7a9c16c992fd10a
https://doi.org/10.19080/pbsij.2017.04.555636
https://doi.org/10.19080/pbsij.2017.04.555636
Publikováno v:
2015 ASEE Annual Conference and Exposition Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e06c344921dcfe42209ee45802249b24
https://doi.org/10.18260/p.24549
https://doi.org/10.18260/p.24549
Publikováno v:
UCalgary LCR OJS Integration
A book review of A Pocket Guide to Online Teaching: Translating the Evidence-Based Model Teaching Criteria, by Aaron Richmond, Regan Gurung, and Guy Boysen.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::21f17206dc68bc4b331dd233b139b873
https://journalhosting.ucalgary.ca/index.php/TLI/article/view/73854
https://journalhosting.ucalgary.ca/index.php/TLI/article/view/73854
