Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Chris Cioffi"'
Autor:
Chris Cioffi, Deborah M. Florence, Chuck Russell, Sheila Burtosky, Jason Doub, Keith Mortensen
Publikováno v:
ECS Transactions. 11:291-298
Reliable via formation requires complete polymer removal in vias prior to barrier deposition to obtain low electrical resistance contacts between metal conductor layers. A failure mechanism of high resistance and open vias was observed due to aluminu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::631345d4c38f062052cb321da1d48ad8
https://doi.org/10.1149/1.2779391
https://doi.org/10.1149/1.2779391
Autor:
Deborah M. Florence, Sheila Burtosky, Chris Cioffi, Jason Doub, Raymond Lappan, Keith Mortensen, Chuck Russell
Publikováno v:
ECS Meeting Abstracts. :1048-1048
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bca8bcc5fe8549f8b1b5a1e88905a642
https://doi.org/10.1149/ma2007-02/18/1048
https://doi.org/10.1149/ma2007-02/18/1048