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pro vyhledávání: '"Chris C. Hobbs"'
Publikováno v:
AIP Conference Proceedings.
The performance of deep submicron devices depends heavily on the electrical properties of the gate dielectric. Electrical properties such as dielectric constant, leakage current density, interface trap and oxide trapped charge, dielectric integrity,
Publikováno v:
AIP Conference Proceedings; 2001, Vol. 550 Issue 1, p105, 8p