Leakage issues in failure analysis of p+ SiGe active area short monitor.

Autor: Arya, A., Johnson, G.M., Ronsheim, P., Nxumalo, J., Molella, C.M., Murphy, R.J., Seung Chul Lee, Daleo, C., Bum Ki Moon, Onoda, H., Chung Woh Lai, Shenzhi Yang, Chow, Y.T.C., Lee, J.

Publikováno v: 2011 18th IEEE International Symposium on the Physical & Failure Analysis of Integrated Circuits (IPFA); 2011, p1-4, 4p