The influence of annealing temperature and film thickness on crystallization behaviors of IGZO thin films.

Autor: Jo, Jaeseung, Cho, JaeYu, Hong, Hee Kyeung, Kim, Sungman, Lee, Jehun, Lim, JunHyung, Song, Junho, Kim, Jin Hyeok, Heo, Jaeyeong

Publikováno v: 2015 22nd International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD); 2015, p147-149, 3p